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China begins making homegrown DUV chipmaking tools, The Information reports - Finance news and analysis from Global Banking & Finance Review
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China begins making homegrown DUV chipmaking tools, The Information reports

Published by Global Banking & Finance Review

Posted on July 27, 2026

2 min read

· Last updated: July 27, 2026

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China begins making homegrown DUV chipmaking tools, The Information reports

China's Breakthrough in Domestic Chipmaking Equipment

Introduction to China's DUV Lithography Machines

July 27 (Reuters) - China has begun manufacturing domestically developed immersion deep ultraviolet lithography machines, a key chipmaking tool long dominated by Dutch supplier ASML, The Information reported on Monday.

The machines are expected to be delivered this year to leading Chinese chipmakers, including Semiconductor Manufacturing International Corp, Hua Hong Semiconductor and ChangXin Memory Technologies, the report said, citing people familiar with the matter.

Market Impact and Industry Response

ASML's Reaction and Market Performance

ASML declined to comment to a request from Reuters. The company's shares slipped more than 7%, putting the stock on track for its worst day since June 8.

Effect on Global Chip Equipment Supply Chain

The report also weighed on the shares of companies exposed to the global chip equipment supply chain. BE Semiconductor Industries tumbled about 8.5%, Soitec fell 5%, while Infineon Technologies dropped nearly 3%.

Key Details from The Information's Report

Confidentiality and State-Backed Manufacturer

• The people did not identify the state-backed manufacturer due to the sensitivity of the matter.

Performance, Reliability, and Production Plans

• The breakthrough could eventually challenge ASML in China, but the system still lags on performance and reliability and needs further testing before mass production, leaving the Dutch company's advantages intact for now.

• Production will be limited initially, with about five DUV machines this year and roughly 20 in 2027.

Technological Context

DUV vs. EUV Lithography

• Immersion DUV machines, which print circuit patterns onto silicon wafers, are the most advanced lithography tools available to Chinese chipmakers after restrictions cut off access to extreme ultraviolet lithography (EUV) systems.

• China is also developing a domestic EUV machine, though it remains at the prototype stage.

Geopolitical and Strategic Implications

• The technology could give Chinese chipmakers an alternative source of critical equipment as the U.S. considers tighter restrictions on foreign lithography tool exports and servicing in China.

Reporting Credits

(Reporting by Rashika Singh in Bengaluru; Editing by Vijay Kishore)

Key Takeaways

  • China’s state‑backed group, including Shanghai Yuliangsheng (linked to SiCarrier and Huawei), is producing immersion DUV lithography machines domestically, with around five units expected in 2026 and ~20 in 2027 (theinformation.com).
  • Chinese DUV systems lag ASML in performance, reliability and production scale; ASML shipped 131 immersion DUV systems last year, while China’s output remains limited (theinformation.com).
  • The development supports China’s push for chip‑making autonomy amid U.S. export restrictions—particularly as domestic EUV remains at a prototype stage years from commercialization (theinformation.com).

References

Frequently Asked Questions

What are DUV lithography machines?
DUV, or deep ultraviolet lithography machines, are advanced chipmaking tools that print circuit patterns onto silicon wafers.
Which Chinese companies will receive the homegrown DUV machines?
Leading recipients include Semiconductor Manufacturing International Corp, Hua Hong Semiconductor, and ChangXin Memory Technologies.
Why is China developing its own chipmaking tools?
China is developing domestic tools due to restrictions on importing foreign lithography machines and to reduce reliance on overseas suppliers like ASML.
How many DUV machines will China produce initially?
Production is limited to about five machines in 2024, expanding to roughly 20 by 2027.
Does China have access to EUV lithography technology?
China's access to EUV lithography is restricted, and domestic EUV machine development is still at the prototype stage.

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